JPS6218362Y2 - - Google Patents

Info

Publication number
JPS6218362Y2
JPS6218362Y2 JP1982112807U JP11280782U JPS6218362Y2 JP S6218362 Y2 JPS6218362 Y2 JP S6218362Y2 JP 1982112807 U JP1982112807 U JP 1982112807U JP 11280782 U JP11280782 U JP 11280782U JP S6218362 Y2 JPS6218362 Y2 JP S6218362Y2
Authority
JP
Japan
Prior art keywords
wafer
suction
vacuum
annular
back surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982112807U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5917159U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1982112807U priority Critical patent/JPS5917159U/ja
Publication of JPS5917159U publication Critical patent/JPS5917159U/ja
Application granted granted Critical
Publication of JPS6218362Y2 publication Critical patent/JPS6218362Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Registering Or Overturning Sheets (AREA)
  • Jigs For Machine Tools (AREA)
JP1982112807U 1982-07-27 1982-07-27 真空チヤツク装置 Granted JPS5917159U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1982112807U JPS5917159U (ja) 1982-07-27 1982-07-27 真空チヤツク装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1982112807U JPS5917159U (ja) 1982-07-27 1982-07-27 真空チヤツク装置

Publications (2)

Publication Number Publication Date
JPS5917159U JPS5917159U (ja) 1984-02-02
JPS6218362Y2 true JPS6218362Y2 (en]) 1987-05-12

Family

ID=30261373

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1982112807U Granted JPS5917159U (ja) 1982-07-27 1982-07-27 真空チヤツク装置

Country Status (1)

Country Link
JP (1) JPS5917159U (en])

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0671689B2 (ja) * 1985-11-27 1994-09-14 株式会社日立製作所 研磨、研削用真空吸着装置
JP2768867B2 (ja) * 1991-03-29 1998-06-25 株式会社日立製作所 真空チャック装置
JPH11309638A (ja) * 1998-04-28 1999-11-09 Kyocera Corp 真空吸着盤
JP5009101B2 (ja) * 2006-10-06 2012-08-22 株式会社荏原製作所 基板研磨装置
JP6358879B2 (ja) * 2014-07-16 2018-07-18 株式会社ディスコ 被加工物保持ユニット
JP6325933B2 (ja) * 2014-07-28 2018-05-16 日本特殊陶業株式会社 真空チャック
JP6725326B2 (ja) * 2016-06-03 2020-07-15 日本特殊陶業株式会社 真空チャック及び真空チャックの製造方法
JP6774714B2 (ja) * 2016-07-25 2020-10-28 株式会社アドテックエンジニアリング ワークステージ及び露光装置

Also Published As

Publication number Publication date
JPS5917159U (ja) 1984-02-02

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